Abstract
Three-dimensional (3D) microstages driven by electrostatic comb actuators that provide continuous motion along three axes (x,y and z) were fabricated and applied to friction force measurement using an AFM (atomic force microscope). The 3D microstages were fabricated in a 20-μm-thick device layer on an SOI (silicon on insulator) wafer by using DRIE (deep reactive ion etching). An AFM was then used to operate the 3D microstage as its scanning devise. By measuring the grating on the traveling table in high vacuum (〜10^<-6>Pa) and under high temperature (〜300℃), motion of 3D microstages was evaluated. The relation between the friction force and sliding speed (scanning frequency) was examined in high vacuum.
