Abstract
Adhesive force of a diamond-like carbon (DLC) film was measured by using an AFM at various temperatures of specimens in air under the relative humidity controlled. We fabricated the original sample stage of the AFM that is able to control temperature of specimens by use of the peltier element. Adhesive force increased with decreasing temperature of specimens. Laplace pressure of condensed water was predominant as the adhesive force. Before the dew point, the adhesive force depends on the curvature radius of minute asperity on the glass sphere surface. When condensed water occurs more than curvature radius of minute asperity, the adhesive force depends on the curvature radius of glass sphere.