A micromechanical phase transformation model of shape memory alloys (SMA) was introduced in the finite element analysis to calculate the deformation of two or three-dimensional elements. To verify the finite element model, tensile tests for SMA films were performed. The load-displacement relationship and temperature distribution during the loading and unloading were measured and compared with the numerical result. The temperature distribution visualizes the phase transformation because the martensitic transformation is exothermic whereas the reverse transformation is endothermic. The load-displacement relationship was non-linear and had a hysteresis loop. The numerical result could capture such a deformation behavior. Several diagonal higher temperature bands appeared in an SMA film during the loading. The numerical result could not capture them well. Further modification is needed in the finite element model.