1207 薄膜/基板材への押込み硬さにおける基板効果のFEM解析(S05-2 ナノ・マイクロ材料の強度・信頼性(2)ナノ・マイクロ材料の強度物性測定,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)
詳細
Nanoindentation tests are used as a means to determine the elastoplastic properties of thin film deposited on the substrate. For this purpose, the quantities of the thin film must be decoupled from those of the substrate, and it is important to understand how the substrate influences the entire indentation process. We have carried out extensive finite element simulations on this indentation problem and found a new phenomenon. The measured hardness overshot the substrate hardness in a certain combination of the elastoplastic properties of the film and the substrate materials.
