1412 金属基板上に形成したゾル-ゲル法による酸化膜の特性評価(G04-1 機械材料・材料加工(1),21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

抄録

In order to develop an insulation film on metallic surfaces of machine parts for depositing sensors, the materials of SiO_2, Al_2O_3 and ZrO_2 were applied using a Sol-gel method. A spin coating or dip coating was used to form a uniform thin-film and heating temperature was set lower compared with recommendation temperature to prevent change of metal properties. As the results, SiO_2 was not able to obtain high insulation resistance, however the resistance over 200MΩ was obtained by Al_2O_3 coated on substrate with smooth surface. ZrO_2 film yielded the reliable insulating property beyond 200MΩ in the film thickness from 100 nm to 3.6 micrometers by performing annealing in addition to a lower heat treatment condition.