1137 ダイヤフラム式圧力センサー精度に及ぼすダイヤフラム寸法の影響(G03-2 材料力学(2)計測2,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

抄録

The role of a pressure sensor is to display pressure definitely for at least 2000 hours. However, a residual strain after reloading occurs in the diaphragm using in the high-pressure. This study involved a finite element analysis of the sensor. As the result of the analysis, the residual strain was improved by making the thickness of diaphragm thicker. However, it is thought that the sensitivity of a sensor may become poor. Therefore, it is important to reduce the force by optimizing the structure. Measurement accuracy and durability is required of high-pressure equipment. Therefore, it is important with the diaphragm type pressure sensor to examine the influence that shape and the size of diaphragm exert on the measurement accuracy and durability. As a first step, the diaphragm size was clarified. A finite element method (FEM) based on the experimental design was used. And, to optimize the size of the diaphragm, each part was examined by clarifying the stress and warp distributions.