A displacement magnification mechanism for piezoelectric actuator usually adopts elastic guide such as parallel translation mechanism with flexure hinges in order to avoid influence of stick slip motion caused by solid friction. Therefore the mechanism has poor damping ability. Residual vibration makes settling time long when the mechanism is driven quickly. An Impact damper uses energy of collision to dissipate vibration energy and does not use fiction force. It can work without spoiling the merit that the displacement magnification mechanism has no stick slip motion. The authors tried to apply the impact damper to displacement magnification mechanism and investigated differences by setting conditions of the damper. The effects of the damper are presented in the report.