3324 Study on a Process Planning System for MEMS Device using 3D Geometric Model
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Recently, because markets of MEMS develop rapidly, it is expected to increase occasions of MEMS device design. However, it is difficult for designers unlearned in MEMS fabrication process to judge whether the device can be fabricated or not. In our study, we developed a process planning system for MEMS device using 3D geometric model based on block segmentation, which derives all fabrication sequences and their recipes.
