3114 Possibility of the formation of carbide-derived carbon by ion bombardment
Details
Carbide-derived carbon (CDC) is expected to replace carbon films made by plasma-assisted method. For, if CDC were used on surface of the tools, longevity of tools would be long. Because the adhesion between the CDC film and the substrate is strong. But in CDC process, Chlorine gas is used, and it is dangerous in the industrial fields. So we tried to make CDC by ion bombardment. We conducted ion bombardment on sintered SiC substrates, and analyzed the specimens by Auger Electron Spectroscopy (AES) and Raman Spectroscopy. As a result, it is clarified that carbon concentration on surface was increased by ion bombardment. And it is the peaks that indicates C-C bond's exist in bombarded specimens was observed. Therefore, we thought that possibility of making CDC with ion bombardment was indicated in this research.
