Hydrogenation operated bending motion device, which was a platinum coated LaNi_5 hydrogen storage alloy film deposited on a polyimide sheet at elevated temperatures, had been successfully developed. When the substrate temperature was 373K, the strain (Δε) was 550ppm, which displacement was 1.8 times larger than that (300ppm) at room temperature (323k). LaNi_5 alloy thin films were prepared by DC magnetron sputtering process at different substrate temperatures from 323K to 525K and different Ar gas pressure from 0.4 Pa to 1.0 Pa. As a result, the bending motion after 10000s, there sample expressed different bending motion strain at each DC magnetron sputtering process.
