306 光てこAFMのダイナミック計測における振動振幅・位相の補正手法の研究 : 任意位置のダンピングによる根元加振/試料加振時の補正への影響(T01-2 マイクロ・ナノダイナミクスの計測と制御(2),大会テーマセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)
詳細
Forced vibrations of a cantilever with a damping at the tip at the arbitrary position used in an atomic force microscope (AFM) have been analysed and vibration amplitude and phase shift of the cantilever end that will be measured by using the optical lever method have been predicted theoretically. It was found that the predicted amplitude and phase shift includes errors and correction of the amplitude and phase shift depending on the vibration freqency is necessary. The amplitude correction factor and phase correction value has been newly derived. These results are useful for ultrahigh accuracy measurements, especially dynamic measurements, using the AFM.
