抄録
Hydrogen energy is highly expected as renewable energy for its environmental compatibility. To achieve the hydrogen energy-oriented society, precise management or measurement of hydrogen flow rate is required in every phase of manufacture, transportation, and utilization. MEMS sensor has outstanding characteristics such as compact, sensitive, low energy consumption, and also has applicability for various fluid monitoring including hydrogen. In this study, evaluation of output characteristics in MEMS-based mass flow sensor using air and helium. alternative to hydrogen. is performed. Three types of sensors with different element geometry are tested, and output characteristics are obtained. We can confirmed that the sensor output is sensitive to area or distance of heater elements in both gases.
