Abstract
This paper describes a novel fabrication and evaluation of micro intermediate temperature operating solid oxide fuel cells (micro T-SOFC) using proton conducting electrolytes. The micro IT-SOFC has 15mol% Y doped BaZrO_3 (BZY15) electrolyte thin film which is fabricated by pulsed laser deposition (PLD) and Pt-Pd (8:2) electrodes. The micro IT-SOFC single cell was successfully fabricated by micro electro mechanical systems (MEMS) process. The area specific resistance (ASR) of the micro IT-SOFC was over jΩcm^2 which is target value of common SOFC. However, the micro IT-SOFC using proton conductor will fill required performance because it is thought that the electrode reaction resistance can be improved by using appropriate electrode materials.