We analyzed temperature distribution and plastic deformation flow during friction stir spot welding (FSSW) process with the elastic-plastic deformation model using the particle method. Calculation results indicate that temperature distribution is axisymmetric and the temperature below the rotation tool is 300 ℃ at 0.7 s when the diameter of the tool is 8 mm and the rotation speed is 2500 rpm. Plastic flow is upward near the outside of the pin of the rotation tool. Then the flow is downward below the shoulder of the tool. And the flow is upward at the outside of the shoulder to cause a burr. Mixing of the metal below the concave shoulder is strong.