G0601-5-1 Temperature change of substrate with plasma generated by the emission of micro-wave through the coaxial cable torch

Abstract

Restricted gas region close to substrate is strongly heated by plasma, which is generated in open-air by microwave excitation through coaxial-cable plasma torch. The torch is constructed with thin central electrode-column which is surrounded by outer cylindrical metal tube, that is coaxial-cable, and the tip does not poke, or slightly does, out of the cross section of the end of outer cylinder. Heated plasma-spot emerges in the clearance between the tip of electrode and substrate which is placed in parallel close to the end cross section of torch. Temperature change is measured in the reverse of substrate, the other surface of which is heated by plasma.