抄録
Three-dimensional micro-structured surface including a micro gear and aspheric lens is used for industrial robots, medical devices, and optical as well as printing equipments and so on. To measure such surface profile, micro-stylus whose tip ball is less than several micrometers in diameter is necessary. This paper describes the development of a micro-stylus with tip balls of 30μm in diameter. The tip ball is silica spheres with feature of high accuracy and affordable price. Additionally, to reduce the effect of stick-slip oscillation caused by friction, which is crucial problem, we developed a micro-tapping stylus using PZT actuator. Using the micro-tapping stylus, surface profile measurement of a micro gear is carried out.
