J1101-1-2 ギャップクロージング型静電マイクロミラーのマクロモデルによるpull-in現象解析(次世代アクチュエータシステム)

抄録

A macro model is proposed to simulate the micro mirror driven by the gap-closing type electrostatic actuator. The macro model consists of driving-electrodes, torsion bar and movable electrode of mirror prepared by cupper foil and wire. The pull-in phenomenon is observed changing the driving voltage, and the tension applied to the torsion bar. The tension is controlled with the electromagnetic force. Differing from the micro mirror, the macro model can supply the method for changing the tension continuously and independently. The experiment confirms the effect of the tension to extend the controllable region of the gap-closing type actuator. The new driving electrode is proposed with the additional one for controlling the non-linearity of the torsion spring.