年次大会講演論文集
Online ISSN : 2433-1325
セッションID: T0301-2-1
会議情報
T0301-2-1 傾斜ナノコラム集合薄膜の摩擦特性の異方性(マイクロ・ナノの視点からの強度・力学特性評価)
平方 寛之西平 拓箕島 弘二
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We investigate the friction anisotropy of thin films that consist of ordered titanium oblique nano-columns fabricated by glancing angle deposition (GLAD). Ramp-load scratch experiments are conducted with a rectangular indenter along three different directions: forward, reverse and lateral directions. Strong friction anisotropy was observed on the film surfaces where the friction resistance for the reverse direction is higher than those for the forward and lateral directions. This is due to the deformation anisotropy of constituent nano-columns caused by the geometrical anisotropy.
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