S1106-1-2 Effect of Surface Texture on Tribological Properties of Fluorocarbon Thin Film

Abstract

It has been well-known that finely-structured texture on surfaces can bring about stable friction and wear situation. In this study, investigation into the effects of surface nano-texture on tribological properties of fluorocarbon thin film was conducted by sliding friction tests. The nano-structures were generated on the surface of fluorocarbon thin film by means of nonequilibrium atmospheric-pressure remote plasma. Fabrication mechanism of this texture was attributed to anisotropic etching of film surface. Experiment results were shown that surface nano-texture was effective in improvement in friction and wear properties offluorocarbon thin film under lubrication conditions.