S1107-1-4 DLC膜のマイクロスラリージェットエロージョン(MSE)試験 : TEMとAFN観察による摩耗メカニズムの考察([S1107-1]トライボロジーにおける実験・計測・解析手法の新展開)

抄録

Diamond-like carbon (DLC) films are used in various fields because of their ability to generate low friction and high wear resistance. Although there are many evaluation techniques for the surface strength of DLC films, they are not yet sufficiently established. In the present study, we evaluated the wear property of DLC films deposited by unbalanced magnetron sputtering under different bias voltages (0 V, -50 V, -100 V, -150 V). The wear rate (um/min) decreased with increasing bias voltage. In order to discuss the wear mechanism, the worn surfaces were observed by Transmission Electron Microscopy (TEM) and Atomic Force Microscopy (AFM). As a result, the wear proceeds by crack propagation for soft DLC (0V), and by impact fracture for hard DLC film (under bias voltage).