We have developed a novel micro optical diffusion sensor (MODS) based on laser-induced dielectrophoresis (LIDEP), which enables high-speed measurement with a small sample volume and on-site sensing of protein conformation. We have developed a novel Micro Fresnel Mirror (MFM) in order to package a DEP cell and an optical component in one chip. MFM consists of two anchored micro slanted mirrors, torsion springs and stiction anchors. The mirrors are slanted when the stiction anchors reached to the substrate and the torsion springs are twisted. We have analyzed the stress of the micro Fresnel mirror by using the finite element method. In this paper, we report the validity of the fabrication of MFM.
