Abstract
High resolution AFM-nanoindentation combined system was developed. It has a diamond indenter for nanoindentation test and a silicon tip for AFM imaging. The AFM image of the indent obtained with a silicon tip is much better than that with a diamond indenter. The area function, the relationshop between the distance from the tip of a indenter and the projected area, is one of the important factors in nanoindentation measurement and therefore must be calibrated. It is estimated from the high resolution AFM image of the indent. For the diamond indenter used in this study, the area function is well expressed as A(h)=23.9(h+Δh)^2, where Δh=13nm.
