抄録
A study on flow around the micro device is strongly required in MEMS development. The objective of this paper is to study dependence of Reynolds number on reattachment process over a backward-facing step in low Reynolds number flow. The Reynolds number based on step height H is 190-5730 and reattachment length was measured by Micro Flow Sensor (MFS) in a Micro Sensing Wind Tunnel which was constructed in the present research program. The reattachment length from 8H to 21H is observed depending on Reynolds number.
