F-1302 空気静圧軸受けを用いたリニア・アクチュエータの高精度トラッキング(S47-1 機構1 アクチュエータ)(S47 情報機器コンピュータメカニクス)

抄録

In recent years, an annual rate of an area density increase was keeping about 100 % in HDD systems approaching more than 25 Gbits/in^2 in commercial base. Such a high-area density is supported by progresses not only of BPI (Bits Per Inch), but also of TPI (Tracks Per Inch). The far higher area density necessitates a highly precise positioning mechanism with a high motion speed. In order to realize such a mechanism with stable following and seeking motion, a linear actuator was constructed and tested. We have designed a linear actuator of 7 and 9 kHz resonance frequency. The cause of two resonance frequencies comes from weak rigidity of a coil frame. Therefore, we redesigned a new voice coil motor for the linear actuator. A new actuator resonance was over 10 kHz. The servo bandwidth reached up to 4 kHz. Precise feed and positioning of 5 nm / 10 sec were achieved by the linear system.