抄録
Non-silicon based micro machining requires multiple principles to access different materials according to each objective, and also a single set-up to attain the repeatability. Using conventional machine tools normally take more than one process from roughing to finishing thus is energy consuming, costly and yet inconsistent. Newly developed in this research is a multifunctional macro-machining system capable of milling, turning, grinding, buffing, polishing, EDM, ECM, Laser machining and their combination. The system takes the same structure as a machining center with four degrees of freedom, desktop size and 0.1 μm positioning accuracy. This paper particularly describes the micro-milling and micro-EDM functions with assistance of CAD/CAM/CAE and IT infrastructure.
