F-1335 A Micro Pump Using Peristaltic Motion with Bimorph-type PZT Elements Allay : Characteristics of a Single-side Driven-type Peristaltic Micro Pump

Abstract

In this study, a novel peristaltic micro pump using bimorph type PZT elements is proposed. The pumping of liquid is realized by peristaltic motion of metal film with controlling driving voltage of 5 bimorph-type PZT elements that are laid on the metal film. In this paper, the peristaltic micro pump (20mm×20mm×2mm) is fabricated to verify the pumping principle and to examine the characteristics. The maximum output flow rate of 220mm^3/min is obtained and the maximum load pressure of 2.3kPa is obtained.