抄録
We have developed a novel piezoelectric microactuator for the head-slider drive dual-stage actuator systems in magnetic disk drives. This microactuator is based on a symmetrical structure and a symmetrical operation. The piezoelectric actuator devices used in the system are simple rectangular multilayered structure. A prototype model with pico-slider and the head suspension has been tested to demonstrate 0.8μm displacement at a dc applied voltage of 30V and fundamental resonant frequency over 20kHz.
