抄録
The objective of this project is to develop a battery - powered ornithopter Micro Air Vehicle (MAV) using MEMS technology. The major goal of the MAV project focuses on flapping wing propulsion systems. This paper summarizes the bottom-up design approach involved in new IC-processed micrometer thick silicon wings. The proposed MEMS - based wings have been designed so as to allow two degrees of freedom : flapping and feathering. The wings are actuated through nearly 20,000 elementary actuation cells that are distributed over the upper surface of single crystal silicon structures.
