Proceedings of JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE
Online ISSN : 2424-3132
2003
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HDI-20 Slider Vibration Reduction Using Slider Surface Texture
Lin ZhouMichael BeckHans H. GatzenKenneth J. AltshulerFrank E. Talke
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CONFERENCE PROCEEDINGS FREE ACCESS

Pages 231-232

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Abstract
Pico-sliders with nominal flying heights of 5 and 7 nm were etched using argon plasma etching. An island-type texture with a height of 4.5 nm was fabricated on the slider surface. The in-plane and out-of-plane vibrations of textured and untextured sliders were investigated using laser Doppler vibrometry (LDV) during contact start/stop. The results show that the amplitudes of both out-of-plane and in-plane vibrations are reduced as a consequence of the texture on the slider surfaces.
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© 2003 The Japan Society of Mechanical Engineers
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