MNS-12 Development of Pneumatic Servo Bearing Actuator for Nano-Positioning(Micro/Nanosystem Science and Technology III,Technical Program of Oral Presentations)
Released on J-STAGE: June 19, 2017 |
2009
MNS-12
Katto Satoshi, Masato Kadotani, Takakazu Kitagawa, Tomoko Hirayama, Takashi Matsuoka, Katsumi Sasaki