OD-04 CHARACTERISTICS AND CONTROL OF MEMS MIRRORS FOR OPTICAL CROSS-CONNECT SWITCH

Joji Yamaguchi; Nobuyuki Takeuchi; Akira Shimizu; Tsuyoshi Yamamoto; Eiji Higurashi; Renshi Sawada; Yuji Uenishi

doi:10.1299/jsmemipe.2003.261

Proceedings of JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE

Online ISSN : 2424-3132

2003

DOI https://doi.org/10.1299/jsmemipe.2003.261

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OD-04 CHARACTERISTICS AND CONTROL OF MEMS MIRRORS FOR OPTICAL CROSS-CONNECT SWITCH

Joji Yamaguchi, Nobuyuki Takeuchi, Akira Shimizu, Tsuyoshi Yamamoto, Eiji Higurashi, Renshi Sawada, Yuji Uenishi

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CONFERENCE PROCEEDINGS FREE ACCESS

Pages 261-262

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Abstract

A MEMS mirror that we are developing for a three-dimensional MEMS optical switch module features a terraced electrode structure that enables low driving voltage. The mirror can tilt more than 4 degrees at less than 80-V driving voltage. A control method for the MEMS mirror achieves a short switching time. We demonstrate 3 msec switching time.

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