Proceedings of JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE
Online ISSN : 2424-3132
2003
Conference information
OD-04 CHARACTERISTICS AND CONTROL OF MEMS MIRRORS FOR OPTICAL CROSS-CONNECT SWITCH
Joji YamaguchiNobuyuki TakeuchiAkira ShimizuTsuyoshi YamamotoEiji HigurashiRenshi SawadaYuji Uenishi
Author information
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 261-262

Details
Abstract
A MEMS mirror that we are developing for a three-dimensional MEMS optical switch module features a terraced electrode structure that enables low driving voltage. The mirror can tilt more than 4 degrees at less than 80-V driving voltage. A control method for the MEMS mirror achieves a short switching time. We demonstrate 3 msec switching time.
Content from these authors
© 2003 The Japan Society of Mechanical Engineers
Previous article Next article
feedback
Top