MN-09 DYNAMIC MENISCUS MODELS FOR MEMS ELEMENTS

Proceedings of JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE

Online ISSN : 2424-3132

2003

DOI https://doi.org/10.1299/jsmemipe.2003.71

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MN-09 DYNAMIC MENISCUS MODELS FOR MEMS ELEMENTS

Shunji MATSUMOTO, Yoshinobu NISHINE, Akitoshi YAMAGUCHI, Hiroshi MORISHITA, Hiroshige MATSUOKA, Shigehisa FUKUI

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CONFERENCE PROCEEDINGS FREE ACCESS

Pages 71-72

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© 2003 The Japan Society of Mechanical Engineers

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