MC-02 FEM analysis and control of micro actuator with piezoelectric element for spinstand

Akihiro NAGANAWA; Shigeki MORI; Hirohiko TADA; Yotsugi SHIBUYA; Goro OBINATA; Kazuhiro OUCHI

doi:10.1299/jsmemipe.2003.8

Proceedings of JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE

Online ISSN : 2424-3132

2003

DOI https://doi.org/10.1299/jsmemipe.2003.8

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MC-02 FEM analysis and control of micro actuator with piezoelectric element for spinstand

Akihiro NAGANAWA, Shigeki MORI, Hirohiko TADA, Yotsugi SHIBUYA, Goro OBINATA, Kazuhiro OUCHI

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CONFERENCE PROCEEDINGS FREE ACCESS

Pages 8-9

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Abstract

In this paper, a new micro actuator is discussed to realize highly precise track following for a HGA (head gimbals assembly) of a spinstand system. The actuator is constructed with a piezoelectric element (PZT) and a stroke amplification mechanism, and is designed by using FEM (finite element method) analysis. The control system is designed to show high robustness against HGA variations of any kinds of HGA's.

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