抄録
This paper describes design and fabrication of a MEMS-based active head slider using a PZT thin film for flying height control in magnetic recording. An air bearing surface (ABS) geometry which generates very low aerodynamic lift force at the head has been designed. The slider has been fabricated monolithically by silicon micromachining process. Change in the flying height of the head above a spinning disk has been successfully confirmed by applying voltage to the PZT actuator.
