PRE-04 Driving Characteristic of an optical MEMS Switch Using a Belt-shaped Thin Film Mirror and a High Dielectric Constant Layer(MM/Micro/Nano Precision Equipments II,Technical Program of Oral Presentations)
The authors have studied the new optical MEMS switch using a belt-shaped thin film mirror. This paper describes the reduction of the driving voltage of the optical switch. For the reduction, the thin film mirror and the high dielectric constant material were used and the suitable driving signal input was examined.
