P-PRE-03 Principle and Basic Characteristics of a New Optical MEMS Switch Using a Belt-shaped Thin Film Mirror(MM/Micro/Nano Precision Equipments,Technical Program of Poster Session)

Kazutoshi Okutsu; Yuuki Matsumoto; Kaiji Sato

doi:10.1299/jsmemipe.2009.411

Proceedings of JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE

Online ISSN : 2424-3132

2009

Session ID : P-PRE-03

DOI https://doi.org/10.1299/jsmemipe.2009.411

Conference information

P-PRE-03 Principle and Basic Characteristics of a New Optical MEMS Switch Using a Belt-shaped Thin Film Mirror(MM/Micro/Nano Precision Equipments,Technical Program of Poster Session)

Kazutoshi Okutsu, Yuuki Matsumoto, Kaiji Sato

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Abstract

This paper describes the principle and basic characteristics of a new optical MEMS switch using a belt-shaped thin film mirror. The thin film mirror between the two substrates is deformed and driven by electrostatic force. The effect of the design parameters of the switch on the minimum driving voltage is examined.

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