抄録
Carbon and boron nitride nanoperiod multilayer films were deposited by bias radio frequency (RF) sputtering. Nanovibration processing was performed on the nanoperiod multilayered films with electroconductive diamond tips. In the case of processing without vibration, since the strength of the nm-period multilayer film was large, the processing volume of this film was small. Applying vibration during processing, processing depths significantly increased. Accordingly, the processed groove with nearly 2nm depth corresponding to the thickness of the multilayer film can be easily performed. In lateral vibration processing test, not only nanoprocessing but also nanometer scale evaluation can be performed due to their difference of friction force and current properties. As a result, the composition orientation of the nanoperiod multilayer film and the interface formed between C layer and BN layer were experimentally confirmed.
