抄録
The tribological properties of patterned surfaces were investigated under lubricated conditions. Micropatterns were fabricated on a Si surface using a combination of photolithography and plasma etching. NiFe-film with a 150 nm thickness was then deposited on the patterned Si surface. We prepared four kinds of patterned surfaces: dimple, grating, bump and mesh patterns. The dimensions of the patterns were: size 30 to 40 μm and depth 10 to 12 μm. Friction tests were carried out using a pin-on-plate tribometer. The results showed that the friction coefficients of the two reverse patterns showed very similar tendencies and that circular patterns had a lower friction coefficient than did the rectangular patterns at a high bearing characteristic number. The surface geometry of the Si surface did not affect the friction coefficients at a low bearing characteristic number.
