Abstract
We proposed a novel fabrication method of multilayer thin-film piezoelectric actuators composed of 500 nm-thick Pb(Zr,Ti)O_3 (PZT) layers by a single sputtering deposition process. This method enables the fabrication of multilayered piezoelectric thin films with separated intermediate electrodes on SOI substrates without photolithography. We successfully improved, for the first time, the effective transverse piezoelectric properties utilizing the multilayer thin-film structure with increasing a number of PZT layers. We also confirmed that the multilayer thin-film structure enhanced the dielectric properties with increasing a number of PZT layers.
