MoP-40 A MAGLEV LENS DRIVING ACTUATOR FOR HIGH-FREQUENCY AND MULTI-DOF LASER FOCUS POSITIONING IN LASER BEAM CUTTING

抄録

In order to realize high-frequency and multi- dimensional laser beam focus positioning during laser beam cutting, a maglev 3-DOF lens driving actuator is developed. The objective of this paper is the design and fabrication of a compact maglev lens driving actuator which can drive the lens in both the axial and radial directions, and can be accommodated in the laser head of a conventional laser cutting machine.