Proceedings of JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE
Online ISSN : 2424-3132
2015
Session ID : WeB-3-1
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WeB-3-1 FRICTION PROPERTIES OF NANOSTRIPE STRUCTURES IN VACUUM ENVIRONMENT
Shunsuke AbeYasuhisa Ando
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Abstract
We examined the dry friction properties of the nanostripe structures consisted of soft metal (Ag) and hard metal (Cr) on Si substrate with periodic slope array. The friction coefficient was measured between Ag-Cr nanostripe structure and six counterparts (Mo, Ni, Ti, Al_2O_3, SUJ2, Si_3N_ 4) using a reciprocating friction tester. The nanostripe structure showed friction coefficient of a 0.5 or more in the atmospheric air. In contrast, when the nanostripe structure was rubbed in a vacuum of 2×10^<-4> Pa, the friction coefficient decreased with number of the reciprocating motions and showed between 0.2 and 0.3 at the end of reciprocating friction. The nanostripe structure shows higher wear rate in vacuum than in the air. SEM-EDX (scanning electron microscopy-energy dispersive X-ray spectroscopy) observations showed that Ag film covered nanostripe surface on the wear track.
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© 2015 The Japan Society of Mechanical Engineers
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