OS0912 RFマグネトロンスパッタリング法による新規無鉛圧電薄膜の創製(OS9-3 生体機能・材料(セラミックス),OS-9 生体機能・材料)

抄録

Biocompatible piezoelectric materials are becoming increasingly important for actuators and sensors in medical devices such as Bio-MEMS. In this study, a biocompatible piezoelectric MgSiO_3 thin film, which was discovered through first principles calculation, has been fabricated on Cu (111) single crystal substrate by RF magnetron sputtering method. The experimental design method was employed to find an optimum sputtering condition. Then, the crystal structure and the element component of the fabricated MgSiO_3 thin film were analyzed with X-ray Diffraction (XRD) and X-ray Fluorescence Analysis (XRF), respectively. As a result, the fabricated MgSiO_3 thin film was proved to have tetragonal perovskite crystal structure and ideal element component.