抄録
A new test method is proposed in this study to determine the apparent interfacial toughness of brittle thin films on substrate by using of the delamination area by indentation. The equivalent length of delamination crack is defined from the delamination area by indentation. The experimental results revealed that the ratio of the equivalent length of delamination crack and the radius of impression is related to the interfacial strength of thin films and independent with the indentation load. The equation to evaluate the apparent interfacial toughness of thin films from the ratio of the equivalent length of delamination crack and the radius of impression is proposed in this study based on the results of finite element analysis.
