抄録
Room-temperature creep on the nanoscale was evaluated on Ta_2O_5 doglegged nanocolumns grown on a Si_3N_4/Si substrate using glancing angle deposition. An experimental method for the nanocolumn arrays using a micro-brick specimen (〜2 μm high and 〜2 μm wide) was used for the creep experiments. In this sample, we intentionally fabricated doglegged-shape so that stress concentration occurred at the corner of nanocolumn. Although Ta_2O_5 in bulk does not experience creep at room temperature, the Ta_2O_5 nanocolumns deformed in a time-dependent manner under a constant applied force and then fractured at the corner of doglegged-shape. This suggested that creep greatly accelerated in the metal oxide nano-components in comparison with their bulk counterparts.
