M&M材料力学カンファレンス
Online ISSN : 2424-2845
セッションID: OS1501
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OS1501 エレクトロマイグレーションによる微細材料大量創製へ向けたサンプル構造改良に関する研究
木村 康裕佐々木 崇紘坂 真澄
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会議録・要旨集 フリー

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Micro-materials attract attention with their remarkable properties, including mechanical, thermal, electrical attribute. Various techniques have been developed for fabricating micro-materials. The fabrication technique by utilizing electromigration (EM), which is the physical phenomenon of atomic diffusion in a metallic line with a high-density electron flow, is one of the fabrication methods for generating micro-materials. EM technique can generate micro-materials with a high-aspect ratio, pure Al components, an arbitrary form, and a single-crystal structure. Whereas EM has significantly advantages, multiple micro-materials are difficult to fabricate simultaneously. The technique using conductive passivation and comb pattern has been recently developed for fabricating multiple micro-materials by the authors. The present study demonstrates the multiple fabrication more than previous research, and provides the approach for improving fabrication of multiple micro-materials by EM.
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