The CoNiCrAlY coated Ni-base superalloy was exposed at 1000 and 1100℃ for up to 1000h. The morphology and residual stresses in the Thermally Grown Oxide (TGO) layer on the CoNiCrAlY coating were examined by microscopic observation and luminescence spectroscope. The low pressure plasma sprayed CoNiCrAlY coating (LPPS) shows the thinnest TGO layer and lowest residual stress, while the air plasma sprayed CoNiCrAlY coating (APS) shows thicker TGO layer and higher residual stress than the high velocity oxygen fuel sprayed CoNiCrAlY coating (HVOF).