毛管現象が及ぼす薄板変形における流体摩擦力の影響

抄録

Structural interaction between solids and liquids is observed in various industrial fields such as wet-etching process in high aspect ratio pillars. Because a liquid bridge formed from a droplet between solid surfaces generates attraction force due to surface tension, it is necessary to quantitatively evaluate it for structural design. In this study, a pair of polymer plates fixed at one end with a small gap is submerged into liquid, so that capillary rise between the plates and plate deflection can be simultaneously observed. The experimental results of plate deflection are compared with analytical estimation obtained from an equation of motion for liquid column taking account of viscosity of liquid. This estimation corresponded well with the experimental results regardless of dimension of plate and submergence rate. In addition, the relationship between plate deflection and material constants is derived in a non-dimensional form. Therefore, plate deformation due to capillary attraction became predictable without experiments, only from dimension of plates and material constants.