The Proceedings of the Materials and Mechanics Conference
Online ISSN : 2424-2845
2016
Session ID : OS11-24
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Fracture criterion of single crystal silicon with stress concentration region in nanometer scale
Takashi SUMIGAWAShuhei TANAKAHiroki UNNOTakayuki Kitamura
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

In order to examine the size effect of a stress concentration region on fracture strength at the nanometer scale, fracture experiments were carried using silicon single crystal cantilever specimens with a notch. A crack was initiated along the (110) cleavage plane from the notch root. Finite element analyses pointed out that the fracture strength, which was evaluated by the normal stress at 1 nm from the notch root, gradually increased with decrease of the stress concentration region size and reached the ideal strength of the (110) cleavage plane of silicon.

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© 2016 The Japan Society of Mechanical Engineers
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