Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : October 08, 2016 - October 10, 2016
A highly sensitive two-dimensional strain sensor, which consists of area-arrayed fine bundles of multi-walled carbon nanotubes (MWCNTs), has been developed by applying MEMS technology. In the previous studies, it was found that MWCNT bundle used in this study can be repeatedly used in the strain range up to 60%. Area-arrayed MWCNT bundles were grown on the substrate by CVD technique. When the bundle was deformed under a compressive load, the electrical resistance of the bundle changed due to the change of the electronic band structure of the deformed MWCNT. By measuring the change, the pressure distribution was detected precisely.
