繰返し球圧子押込み下におけるセラミックス薄膜の摩耗挙動に及ぼす押込み角度の影響

抄録

In order to develop a new method for evaluating the wear properties of ceramic thin film with high wear resistance, the cyclic sphere indentation tests were carried out with changing the tilting angle of the specimen (indentation angle θ), and the effects of the indentation angle θ on the wear behaviors of ceramic thin film were investigated. The tests were carried out for two types of specimen, TiAlN coated specimen and DLC coated specimen, under θ = 0°, 6°, 12°, 18°. Silicon nitride ball with 5.96mm diameter was used for the sphere indenter. These tests were carried out by using electromagnetic exciter. The sinusoidal cyclic contact load (maximum load=1.0kN, minimum load=0.1kN) was applied to the specimen through the sphere indenter. The loading frequency was 200Hz. By the conventional cyclic sphere indentation test under the indentation angle θ =0°, wear was not observed for both TiAlN film and DLC film even at cyclic number N = 2.0×10⁷. However, by tilting the specimen, wear was observed at much lower cyclic number. It was found that the wear of these films were accelerated by the indentation angle θ, and the wear rate increased with increasing θ. By measuring the cross-sectional shape of wear part by confocal microscope, the cross-sectional area of wear was evaluated, and the wear rate was calculated from the relationship between “the cross-sectional area of wear” and “the number of cycles”. By using the wear rate obtained by this method, it was possible to compare the wear property of TiAlN film and DLC film quantitatively.